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Single Energy Electron Beams for Testing of Substrates

IP.com Disclosure Number: IPCOM000057059D
Original Publication Date: 1988-Mar-01
Included in the Prior Art Database: 2005-Feb-14

Publishing Venue

IBM

Related People

Authors:
Lukianoff, GV [+details]

Abstract

A single energy electron beam tests MLC substrates (ceramic, glass- ceramic, plastic, etc.) to identify opens and shorts. The test process is fast and can charge metals, such as gold, which have a high second crossover point of electron emission. The principles involved here provide for using a high energy beam to place a charge selectively on a pad and internal line, and then to detect the propagation of the charge through the conductor network. Deposition is achieved by stopping the beam at a termination of the net and injecting electrons of the beam into the conductor. The charge propagates through the conductor network and its presence or absence at the tested network terminations indicates the state of continuity of the conductors.