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Silicon Crystal Removal Tool

IP.com Disclosure Number: IPCOM000057064D
Original Publication Date: 1988-Mar-01
Included in the Prior Art Database: 2005-Feb-14

Publishing Venue

IBM

Related People

Authors:
Kostenko, A [+details]

Abstract

This article describes a tool for safely removing a grown silicon crystal from a Czochralski method crystal grower. The tool is self-contained, mobile, and capable of serving multiple crystal growers. (Image Omitted) Fig. 1 shows a grown silicon crystal with attached crystal seed and chuck, as representative of the Czochralski crystal growing process. Diameter 1 can vary from 130 to 210 mm, and length 2 from 300 to 915 mm, within present equipment capability. The largest crystals will weigh as much as 150 pounds. Fig. 2 shows a drawing of a crystal growing chamber 3 with crystal 4 suspended inside. Weight, temperature, and a limited access to the grown crystal combine to make its removal by existing methods difficult. Fig.