Solid-State Laser/Fiber Optic Expose Machine
Original Publication Date: 1988-Mar-01
Included in the Prior Art Database: 2005-Feb-14
A mechanically simple, high precision, non-contact expose system is described. Because of the recent advancements in miniature solid state lasers, fiber optics and photoresists sensitive to laser light, a solid-state laser expose machine was achieved. A single, linear array n of optical fibers, each having a diameter d are bonded to an alignment fixture as shown in Fig. 1. The emitting end of these fibers can be very close to the surface being exposed to limit the divergence of the emitted light. The collecting ends of each fiber are positioned in a fixture that holds the end at the focal point (Image Omitted) of a lens collecting light from a compact, solid state laser source as shown in Fig. 2. While the number of laser sources and fibers to efficiently expose a panel seems high (for .