Data Compression Method
Original Publication Date: 1988-Apr-01
Included in the Prior Art Database: 2005-Feb-15
A method has been proposed for compressing data which is useful for advanced optical inspection systems. A combination of algorithms is used to provide a workable compression ratio. (Image Omitted) In the development of semiconductor devices, improved inspection resolutions, defect detection, algorithms and larger formats require a considerable increase in the amount of data generated. In this proposal reference image data is compressed by software methods. The method is illustrated in Fig. 1. A large product image is defined in GL-1, a graphic language format. This image is converted into a full image binary bit map which, raster by raster, is converted into run length code. Run lengths of zeroes are followed by run lengths of ones with an end row mark included.