Laser Scan System for Surface Inspection
Original Publication Date: 1988-Apr-01
Included in the Prior Art Database: 2005-Feb-15
A fast laser scan system is proposed for measuring profiles of structured surfaces, such as circuit boards with printed conductor lines. Fig. 1 is a side view (y-direction) and Fig. 2 a plan view (z-direction) of the major optical components and of the light path in the system. The incoming laser beam 1 is reflected by the front side F of scan mirror Sc (for) scanning the sample in the y-direction. Mirror Sc may be, for example, an oscillating flat mirror or a rotating polygonal mirror oscillating and rotating, respectively, about the z-axis.