Flip Side Wafer Dome
Original Publication Date: 1988-Apr-01
Included in the Prior Art Database: 2005-Feb-15
A new design for a wafer dome used in semiconductor manufacturing operations provides a substantial increase in throughput. The development is a double-sided wafer holder that may be rotated without breaking vacuum when evaporating upon or etching the wafer surface. Existing wafer holders are solid domes supported and rotated from a central location. They have machined openings to support the wafers. When it is necessary to change from smaller to larger wafers, there is a substantial decrease in the number of wafers which may be processed. In the new design, the wafer dome 1 (Fig. 1) becomes semi- permanent in that it does not have to be removed for cleaning, only the inserts and dome shield 2 will be removed and cleaned.