Yield Analysis Test Site
Original Publication Date: 1988-Apr-01
Included in the Prior Art Database: 2005-Feb-15
Disclosed is a test site design which facilitates the separation of random and non-random yield components by using width/space pairs. The random components are then used to determine the defect size distribution. A test site includes sixteen macros, four sets of various width/space pairs wherein each set consists of four identical macros. The four identical macros enable the use of data-reduction software in simulating larger structures. The four various width/space pairs facilitate the determination of the defect size distribution while the four identical macros facilitate the separation of random and non- random components of yield. This methodology allows analysis of both reconfigurable and non-reconfigurable structures as well as providing more variations of structure size.