Automated Inspection Microscope
Original Publication Date: 1988-Apr-01
Included in the Prior Art Database: 2005-Feb-15
The automated inspection microscope is a system that can measure the microscopic features of hard, magnetic file disk heads. In particular, the system can measure the critical features of tri-rail, ferrite-type heads including the length of gap 20, the width of center rail 22, the width of outside rails 24, the height of throat 26 and the trailing edge bevel 28 (Figs. 1-3). (Image Omitted) During measurement, a linear array 30 of charge coupled devices (CCDs) (Fig. 4) scans a very narrow line of the image created by the microscope. The array is calibrated so that the size of each CCD in the image plane can be related directly to a dimension in the object plane. By measuring the width of a bright object in the image plane in pixels (each CCD is considered a "pixel"), the width of that object can be determined.