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Shielded Sample Mount Fixture for Low Voltage E-Beam Applications

IP.com Disclosure Number: IPCOM000057358D
Original Publication Date: 1988-Apr-01
Included in the Prior Art Database: 2005-Feb-15

Publishing Venue

IBM

Related People

Authors:
Lavallee, KA [+details]

Abstract

A fixture is described which minimizes the deleterious electrical field effects, produced by exposed and unshielded interface I/O wiring, on samples being viewed in low voltage e-beam scanning electron microscopes. In low voltage (<1 Kv) scanning electron microscope (SEM) applications where total containment (shielding) of the sample interface wiring is desirable to prevent aberrations, a fixture has been designed and modeled. The fixture has the following attributes: 1) Shields interface I/O cables from electron beam and vice versa. 2) Prevents loss of secondary electrons due to drift. 3) Protects chamber and sample from contaminants within the SEM test box by using vacuum stable materials. The figure shows a top and side view of the fixture.