Mapper/Glass Ceramic Substrates
Original Publication Date: 1988-May-01
Included in the Prior Art Database: 2005-Feb-15
This article describes an arrangement in which a 4-point locator, X-Y stages and a commercial camera [optical] system operate together to provide mapping of a substrate. (Image Omitted) The products to be mapped are multi-layer glass ceramic substrates. Each substrate has a fiducial cluster consisting of four dots in each of the four corners of the substrate, as illustrated in Fig. 1, and a 10 x 11 pattern of chip site via holes. In the arrangement disclosed herein, it is required to generate X, Y, and d coordinates of the center lines of each chip site in relation to the theoretical centroid of the four fiducial clusters. Once this data is compiled, it is transferred to a host computer and will be used to drive an expose tool.