Apparatus and Method for the Contamination-Free Fusion of Large Quantities of Organic Substances
Original Publication Date: 1988-May-01
Included in the Prior Art Database: 2005-Feb-15
As the purity requirements for organic substances, such as photoresist, polyimide, and the like, which are used in semiconductor technology, are in the sub-ppm range, it is essential that the quantities employed for analytically determining mobile ions, such as Li, Na, K, and the like, be of the order of grams. Additionally, contamination, however slight, by fusion chemicals must be avoided. These requirements are met by the described apparatus, the principle of which is based on open combustion in an oxygen flow. The illustrated apparatus consists of three components: the container 1 for the substance to be analyzed, the fusion tank 2 and the lid 3. Container 1 is made of highly pure synthetic quartz to avoid contamination by dissolving residues after combustion.