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Single Motor Drive System for X-Y Stepper Stage Disclosure Number: IPCOM000057818D
Original Publication Date: 1988-Jul-01
Included in the Prior Art Database: 2005-Feb-15

Publishing Venue


Related People

Kendall, RA [+details]


A single-drive motor is provided for tools which use X-Y stages for micro-positioning purposes. The single motor drive replaces conventional two-motor systems. Motor forces are directed to the X or Y axis through a system of drive bars and capstans. Both axes are equipped with brakes operated to release the axis required to move (Image Omitted) while securing the stationary axis. Conventionally, stepper stages use one motor for each axis. These stages are so configured that the motors can remain stationary while each stage moves, which requires a decoupling mechanism, or so at least one motor travels with the stage. In a plan layout Y-drive bar 1 in Fig. 1 is held against the motor drive capstan 2 by a pinch roller 3 so that when the motor rotates it causes the Y-drive bar to travel in either the +y or -y direction.