Technique for Manufacturing Multi-Pole Electrostatic Deflectors Using a Laminated Block
Original Publication Date: 1988-Jul-01
Included in the Prior Art Database: 2005-Feb-15
An electrostatic deflection assembly comprises a stack of plates interspersed with thin insulating layers. The central area is bored out. This method eliminates the cutting and machining of many separate electrodes and insulators and the accompanying difficulty of insuring precise fabrication and assembly. The construction and assembly of electrostatic deflectors for systems using charged particle beams (for example, E-beam lithography) require a high degree of symmetry and precision. This precision is necessary to avoid aberrations and positioning errors of the beam. The laminated block approach affords such a degree of precision. (Image Omitted) Fig. 1 shows the fabrication of a laminated block B. The thickness of each lamination is chosen so as to provide the desired electrode configuration for a given bore size.