Oven Loading and Unloading Device
Original Publication Date: 1988-Jul-01
Included in the Prior Art Database: 2005-Feb-15
This article relates to a handling device for moving silicon wafer carriers or boats into equipment used for fabricating semiconductors, which can be advantageously used for loading (and unloading) tubular plasma equipments as well as drying ovens. The increasing diameter of silicon wafers makes their handling more and more difficult. Batch-loaded equipment commercially available on the market today, do not currently include any automatic loading device, so loading the elements to be processed into the equipment still remains a critical operation. The handling device comprises a carriage movable along three axes by means of a worm screw system. The carriage travel is monitored by end-of-travel sensors.