Multiple Waveform Acquisition in Image Mode Electron-Beam Testing
Original Publication Date: 1988-Oct-01
Included in the Prior Art Database: 2005-Feb-15
A method for viewing and quantitatively measuring waveforms on integrated circuits with electron-beam testers in an image mode is provided and comprises: a) defining a window which contains the circuit element of interest; b) generating a triggered and delayed sampling gate according to electron-beam testing techniques; c) measuring a secondary electron signal by a gateable analog sampling device when the sampling gate and the window are coincident; d) holding the phase delay constant for a preset number of sampling gates and generating a point for that particular phase delay; e) repeating step d) for a range of different phase delays to create a waveform for the window of interest. (Image Omitted) Multiple waveforms can be detected and measured with parallel electronics.