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Heat Sink for Vacuum Coating

IP.com Disclosure Number: IPCOM000058313D
Original Publication Date: 1988-Oct-01
Included in the Prior Art Database: 2005-Feb-15

Publishing Venue

IBM

Related People

Authors:
Blackwell, KJ Cain, SR Gaige, MR Lamb, CR [+details]

Abstract

A curved heat sink achieves substrate conformance and enables higher deposition rates for vacuum coating thin, heat sensitive materials. In Fig. 1, an arched heat sink 1, for example, a polished sheet of stainless steel, has a threaded stud 2 attached to its back surface and is placed on the top surface 3 of fixture 4 with the stud 2 extending through clearance hole 5. Heat sink 1 is pulled flat against surface 3 by tightening threaded knob 6 against a washer 2A on stud 2. A thin flexible substrate 7, such as polyimide to be coated, is placed on the upper surface of heat sink 1 and gripped at each end by a clamp 8 secured on a row of threaded studs 9 and nuts 10.