HIGH DENSITY AMORPHOUS INSULATING CARBON FILM
Original Publication Date: 1988-Oct-01
Included in the Prior Art Database: 2005-Feb-15
A technique is described whereby amorphous carbon material is fabricated so as to produce a high density insulating carbon film with improved diamond-like characteristics for amorphous carbon. The use of amorphous carbon, with its diamond-like structure, is considered of interest due to many desirable properties, which approach that of crystalline diamond. Unfortunately, the term diamond-like covers a large bandwidth of materials which have varying degrees of SP2 + SP3 type of bonding. It also has varying amounts of bonded hydrogen in the material stabilizing tetrahedrally coordinated carbon, which is not necessarily an SP3 coordination. With the variation in density between diamond (3.519 g/cc) and graphite (2.