Automated Carrier Storage
Original Publication Date: 1988-Oct-01
Included in the Prior Art Database: 2005-Feb-15
A system has been developed for storing wafers during semiconductor manufacturing operations which eliminates outgassing and reduces possible contamination which may occur with conventional methods. The concept uses open downflow wafer racks which provide a clear unobstructed flow of clean air environment air across the wafer surfaces. In the drawing, the Automated Carrier Storage (ACS) system is based around a stainless steel frame 1, open at the top and bottom. Wafer carriers 2 are stored on open wire shelves 3 located toward the front of the cabinet with each shelf slightly pitched to prevent shaking of the wafers in the carriers. Access doors are provided in the front of the cabinet. A carriage 4 on which a slide mechanism 5 is mounted for each column is used to handle the carriers inside the cabinet.