Wafer Transport Mechanism
Original Publication Date: 1988-Dec-01
Included in the Prior Art Database: 2005-Feb-15
This article describes a transport mechanism for the handling of product wafers between standard wafer cassettes and process equipment without damage to the product wafers as well as precision alignment to support equipment, such as cassette elevators, orientor and wafer process tools. The wafer transport mechanism disclosed herein provides fast, accurate and reliable wafer movement. The process to remove a wafer from a cassette or other device begins with a stepper motor rotating the system a known number of steps from a mechanical stop which is home position. A tongue is then extended into the device just below the wafer that is to be removed. The tongue is then lifted as vacuum is (Image Omitted) turned on. It engages the bottom of the wafer. The wafer can now be removed by retracting the tongue.