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Doped Polymide Etching by Laser Ablation

IP.com Disclosure Number: IPCOM000058888D
Original Publication Date: 1988-Jan-01
Included in the Prior Art Database: 2005-Feb-15

Publishing Venue

IBM

Related People

Authors:
Chuang, TJ Hiraoka, H Rettner, CT [+details]

Abstract

The presence of a dopant increases the excimer ablation rate of poly(methylmethacrylate) (PMMA) significantly. Although PMMA does not ablate at 308 nm even under a fluence of 3J/cm2, a doped PMMA film with pyrene has an ablation rate of 1.5 mm/pulse at 1J/cm2 . The dopant effect of acridine on PMMA has also been reported.