Doped Polymide Etching by Laser Ablation
Original Publication Date: 1988-Jan-01
Included in the Prior Art Database: 2005-Feb-15
The presence of a dopant increases the excimer ablation rate of poly(methylmethacrylate) (PMMA) significantly. Although PMMA does not ablate at 308 nm even under a fluence of 3J/cm2, a doped PMMA film with pyrene has an ablation rate of 1.5 mm/pulse at 1J/cm2 . The dopant effect of acridine on PMMA has also been reported.