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Modified Image Reversal Resist Diffusion Bake

IP.com Disclosure Number: IPCOM000058936D
Original Publication Date: 1988-Feb-01
Included in the Prior Art Database: 2005-Feb-15

Publishing Venue

IBM

Related People

Authors:
Cooke, WC Pickens, MW [+details]

Abstract

A significant improvement in MIRP resist developed image profile prior to metallization is achieved by careful control of resist solvent content, pre-exposure bake temperature and ramp-up time to temperature. Necking of resist spaces and excessive undercutting of lift-off profiles are both reduced.