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Method to Eliminate Metal Foot

IP.com Disclosure Number: IPCOM000058937D
Original Publication Date: 1988-Feb-01
Included in the Prior Art Database: 2005-Feb-15

Publishing Venue

IBM

Related People

Authors:
Katz, SM Lyons, CF [+details]

Abstract

The formation of metal patterns by lift-off processing typically results in a "foot" at the base of the metal due to the large undercut required for clean lift-off. This undercut is necessary to allow for a path of solvent attack after metallization which will enable the resist to be removed leaving metal only in the space. A technique is herein disclosed where manipulation of the bottom resist layer in a PCM process results in a metal pattern with no foot.