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Large Capacity, Quick Recovery Copper Evaporation Source for BEOL Applications

IP.com Disclosure Number: IPCOM000058939D
Original Publication Date: 1988-Feb-01
Included in the Prior Art Database: 2005-Feb-15

Publishing Venue

IBM

Related People

Authors:
Mueller, RP Via, G [+details]

Abstract

A large capacity, quick recovery copper evaporation source is disclosed.