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Gel Lapping for Removal of Fencing And Residual Resist

IP.com Disclosure Number: IPCOM000058942D
Original Publication Date: 1988-Feb-01
Included in the Prior Art Database: 2005-Feb-15

Publishing Venue

IBM

Related People

Authors:
Goubau, WM [+details]

Abstract

A process is described for removing fencing and residual photo resist in a thin film structure by means of gel lapping.