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Adhesive Layer of Al2o3 Between Metal Films And Oxide Subtrates

IP.com Disclosure Number: IPCOM000058953D
Original Publication Date: 1988-Feb-01
Included in the Prior Art Database: 2005-Feb-15

Publishing Venue

IBM

Related People

Authors:
Chaug, Y Jahnes, C Kim, J Kim, Y [+details]

Abstract

Adhesion of a conducting metal to an oxide containing substrate, e.g. silicon dioxide, quartz, glass ceramics and ceramics, is enhanced by depositing a layer of alumina, Al2O3, between the conductor and the substrate.