Clean Wafer Transportation
Original Publication Date: 1988-May-01
Included in the Prior Art Database: 2005-Feb-15
The figure schematically shows a cart which is a self enclosed clean room for transportation of semiconductor wafers from one clean room to another through non clean room areas. The cart eliminates the need for commonly used plastic boxes which are a substantial source of contamination to wafers, in particular to wafers not fully fabricated, during transport.