Browse Prior Art Database

Clean Wafer Transportation

IP.com Disclosure Number: IPCOM000059144D
Original Publication Date: 1988-May-01
Included in the Prior Art Database: 2005-Feb-15

Publishing Venue

IBM

Related People

Authors:
Swartzwelder, JD [+details]

Abstract

The figure schematically shows a cart which is a self enclosed clean room for transportation of semiconductor wafers from one clean room to another through non clean room areas. The cart eliminates the need for commonly used plastic boxes which are a substantial source of contamination to wafers, in particular to wafers not fully fabricated, during transport.