Non-Contact Autofocus Method for Planar Surfaces
Original Publication Date: 1988-Jun-01
Included in the Prior Art Database: 2005-Feb-15
Various imaging processes, such as photoexpose, can be performed on a succession of parts or targets, each of which may be of a slightly different thickness. Because of this varying thickness, it is desirable to autofocus the optical image for each part processed. An autofocussing method which would accomplish this is described in the following.