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Formulation of Thermally Stable Resist for Metal Lift off With Novolak Resin Synthesized From Pure Meta Cresol

IP.com Disclosure Number: IPCOM000059169D
Original Publication Date: 1988-Jun-01
Included in the Prior Art Database: 2005-Feb-15

Publishing Venue

IBM

Related People

Authors:
Perreaut, SE Hefferon, G [+details]

Abstract

This article identifies a novolak resin for use in formulating novolak/diazoquinone resist with improved thermal stability.