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Crystal Rate Monitor Alignment Tool

IP.com Disclosure Number: IPCOM000059172D
Original Publication Date: 1988-Jun-01
Included in the Prior Art Database: 2005-Feb-15

Publishing Venue

IBM

Related People

Authors:
Brainard, EJ Fugardi, JF Riley, RF [+details]

Abstract

A tool has been developed for accurately aligning the crystal rate monitor in the evaporation chamber used in the deposition of metals on various surfaces. It replaces a manual rod previously used for alignment purposes.