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Method of Controlling Dopant Diffusion

IP.com Disclosure Number: IPCOM000059199D
Original Publication Date: 1988-Jun-01
Included in the Prior Art Database: 2005-Feb-15

Publishing Venue

IBM

Related People

Authors:
Nguyen, TN Weinberg, ZA [+details]

Abstract

The diffusion constant of dopants can be modulated during processing steps by placing the doped substrate under compression or tensile stress to either enhance or retard diffusion. This technique is useful in counteracting the cumulative effect of temperature and time of multiple, subsequent process steps.