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Method of Controlling Dopant Diffusion Disclosure Number: IPCOM000059199D
Original Publication Date: 1988-Jun-01
Included in the Prior Art Database: 2005-Feb-15

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Nguyen, TN Weinberg, ZA [+details]


The diffusion constant of dopants can be modulated during processing steps by placing the doped substrate under compression or tensile stress to either enhance or retard diffusion. This technique is useful in counteracting the cumulative effect of temperature and time of multiple, subsequent process steps.