Browse Prior Art Database

Stroboscopic SEM Voltage Contrast Measurements

IP.com Disclosure Number: IPCOM000059203D
Original Publication Date: 1988-Jun-01
Included in the Prior Art Database: 2005-Feb-15

Publishing Venue

IBM

Related People

Authors:
May, P [+details]

Abstract

Modulation of the accelerating voltage of a scanning electron microscope is translated into a temporal modulation of the electron probe to provide a convenient method of sampling waveforms under test and allowing real-time viewing.