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Stroboscopic SEM Voltage Contrast Measurements Disclosure Number: IPCOM000059203D
Original Publication Date: 1988-Jun-01
Included in the Prior Art Database: 2005-Feb-15

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May, P [+details]


Modulation of the accelerating voltage of a scanning electron microscope is translated into a temporal modulation of the electron probe to provide a convenient method of sampling waveforms under test and allowing real-time viewing.