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Translator Tool for Wafer Handling

IP.com Disclosure Number: IPCOM000059204D
Original Publication Date: 1988-Jun-01
Included in the Prior Art Database: 2005-Feb-15

Publishing Venue

IBM

Related People

Authors:
Liehr, M Renier, M [+details]

Abstract

A commercially available, magnetically-coupled manipulator with single axis motion can be readily modified by the addition of a clamp and magnetic coupling to provide a wafer handler with four degrees of freedom.