Browse Prior Art Database

Logic State Analysis Via Electron Beam Current Disclosure Number: IPCOM000059207D
Original Publication Date: 1988-Jun-01
Included in the Prior Art Database: 2005-Feb-15

Publishing Venue


Related People

Chiu, G May, P [+details]


Analysis of submicron p-n junctions with transient induced currents on the power bus can be performed with improved spatial resolution by using an electron beam to create the necessary electron-hole pairs as opposed to current induced by an optical beam.