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Logic State Analysis Via Electron Beam Current

IP.com Disclosure Number: IPCOM000059207D
Original Publication Date: 1988-Jun-01
Included in the Prior Art Database: 2005-Feb-15

Publishing Venue

IBM

Related People

Authors:
Chiu, G May, P [+details]

Abstract

Analysis of submicron p-n junctions with transient induced currents on the power bus can be performed with improved spatial resolution by using an electron beam to create the necessary electron-hole pairs as opposed to current induced by an optical beam.