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Temperature Sensing of Semiconductor Wafer

IP.com Disclosure Number: IPCOM000059273D
Original Publication Date: 1988-Jul-01
Included in the Prior Art Database: 2005-Feb-15

Publishing Venue

IBM

Related People

Authors:
Freeouf, JL Knoedler, CM [+details]

Abstract

The temperature of semiconductor wafers can be determined to a high degree of accuracy without contact by sensing the changes in reflectivity of light at the wafer surface due to temperature.