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Formation of Metal Silicon Alloys by Laser Induced Forward Transfer

IP.com Disclosure Number: IPCOM000059277D
Original Publication Date: 1988-Jul-01
Included in the Prior Art Database: 2005-Feb-15

Publishing Venue

IBM

Related People

Authors:
Baseman, RJ [+details]

Abstract

A process is described in which material removed by laser energy from a previously coated transparent substrate impinges on a selected target substrate. The removed material, rather than becoming deposited on the substrate surface, undergoes chemical or physical processes to produce a different useful structure, for instance, metal silicon alloys or silicides. The metal is removed from the transparent substrate by a pulsed laser.