Browse Prior Art Database

Laser Ablation of Thin Chromium Layer

IP.com Disclosure Number: IPCOM000059320D
Original Publication Date: 1988-Aug-01
Included in the Prior Art Database: 2005-Feb-16

Publishing Venue

IBM

Related People

Authors:
Creeden, EP Diamond, LP Nair, KK [+details]

Abstract

The ablation of vias in a polyimide layer of a metallized ceramic polyimide (MCP) is accomplished using a UV laser and employing a thin film deposition system to etch the top chromium (Cr) layer of the bottom metal M-1 and in-situ deposit the top layer M-2 metallurgy. This etching of the Cr layer places added requirements on the deposition equipment and the processing time. The procedure that minimizes these difficulties is as follows.