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Fabrication of Particle Size Standards for Clean Room Monitor Disclosure Number: IPCOM000059331D
Original Publication Date: 1988-Aug-01
Included in the Prior Art Database: 2005-Feb-16

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Bruck, EH Henriques, EH [+details]


Contamination decreases yields in many clean room activities. The Hamamatsu 1800 clean room monitoring device measures particle count and, with calibration, particle size. Size is important in determining contamination sources. This article describes a method of fabricating particle size standards for the Hamamatsu 1800 device.