A1cu-Ti-A1Cu Sandwich Process for Metallized Step Coverage
Original Publication Date: 1988-Sep-01
Included in the Prior Art Database: 2005-Feb-16
Good metal step coverage is essential to the successful employment of lift-off metallurgies in aluminum-copper (A1-Cu) metallization processes. A sequence of process steps is described in this article which provides both good metal step coverage and resistance against the risk of aluminum spike penetration into silicon contact areas.