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This invention teaches the use of disposable and replaceable covers to protect optical elements from contamination and avoids manual cleaning.
English (United States)
This text was extracted from a PDF file.
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Optical Element Pellicles
This invention teaches the use of disposable and replaceable covers to
protect optical elements from contamination and avoids manual cleaning.
Current manual means for cleaning lenses used in tooling found in a
semiconductors fabrication facility is undesirable and time consuming. A
technique for avoiding the frequent cleaning of optical elements exposed to
environmental contamination is disclosed.
By placing a disposable cover (pellicle membrane mounted on a suitable
frame) over an optical element, contamination will collect on the pellicle
membrane and not on the lens surfaces. The pellicle material is used because it
has the ability to make the lens cover transparent to a particular wavelength. The
focal point of the lens is in a different plain from the pellicle membrane and does
not interfere with lens resolution.
A disposable lens cover allows the integrity of high resolution lenses to be
maintained by replacing a contaminated cover with a clean one.