Browse Prior Art Database

High Accuracy Calibration Tooling for Photoplotting System

IP.com Disclosure Number: IPCOM000059445D
Original Publication Date: 1988-Oct-01
Included in the Prior Art Database: 2005-Feb-16

Publishing Venue

IBM

Related People

Authors:
Brophy, DJ Grosso, J Jones, SA Stokrocki, R Weigel, W Will, DG [+details]

Abstract

A method has been devised to improve mask generation required to provide more precise feature definition. The proposal suggests incorporating an optical standard into the generated mask itself, using this as a reference in further operations. Accuracy is improved from +5 mil to + 0.3 mil.