Direct Laser And Electron Beam Writing On Superconducting Materials
Original Publication Date: 1988-Oct-01
Included in the Prior Art Database: 2005-Feb-16
A focussed laser or electron beam is used for writing high spatial resolution patterns directly on superconducting materials. The technique has the capability of either writing superconducting patterns on semiconducting material or semiconducting regions on a superconductor for circuit connections as well as producing active elements.