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Interchangeable X-ray Target Fixture

IP.com Disclosure Number: IPCOM000059517D
Original Publication Date: 1988-Nov-01
Included in the Prior Art Database: 2005-Feb-16

Publishing Venue

IBM

Related People

Authors:
Caldarolo, M Feder, R [+details]

Abstract

A technique is described whereby a single x-ray source, as used in soft x-ray microscopy evaporation units, is provided with an interchangeable x-ray target fixture so that different target materials can be easily inserted into the hearth for processing.