Master-Slice Work-Function-Controlled Mesfet
Original Publication Date: 1988-Nov-01
Included in the Prior Art Database: 2005-Feb-16
A technique is described whereby a master-slice work-function-controlled MESFET, as used in semiconductors technology, provides a field effect transistor (FET) with defined and arrayed metal layers, formed on the semiconductor surface. A fabricating process is described that eliminates the need for multiple patterned implantations or semiconductor depositions.