Magnetic Linear Bearing and Positioning Stage in Clean Room Applications
Original Publication Date: 1986-Jan-01
Included in the Prior Art Database: 2005-Mar-08
This article describes a magnetic linear bearing and the positioning stage for it in clean room applications whereby the contamination of clean air by rolling and sliding bearing surfaces and their lubrications are minimized. Automatic machine tools in clean room applications pose contamination problems due to rolling or sliding bearing surfaces and the lubricants on them. This problem will become more significant in the future because of the increasing use of automation and more stringent clean room requirements. The magnetic bearing disclosed herein provides a means of eliminating this source of contamination. Further, the application of positioning stages in clean rooms is a difficult proposition because of the contamination resulting from these bearing and way lubrications.