Wafer-Carrier Extension for Prevention of Wafer Damage During Insertion or Removal
Original Publication Date: 1986-Feb-01
Included in the Prior Art Database: 2005-Mar-08
An extender is disclosed for use with wafer cassettes which will prevent a wafer which is being removed from or inserted into a cassette from damaging other wafers. Fig. 1 shows a wafer carrier 1 inserted in the wafer extender 2, with the extender 2 in the open position. Fig. 2 shows the extender 2 in the closed position with a wafer 3 being inserted. The extender 2 has slots identical to those in the wafer carrier 1 cassette. All slots are numbered for easier identification when removing or inserting wafers for sampling or processing.