Stabilizer for Large Diameter and Long Stroke Stainless Steel Bellows
Original Publication Date: 1986-Feb-01
Included in the Prior Art Database: 2005-Mar-08
In semiconductor manufacturing operations an ion implant step requires that the implanter offset drive mechanism operate at atmospheric pressure. The offset drive is connected to a vacuum chamber by means of a stainless steel bellows. The disclosed modification adds sliding lateral and axial support to the bellows to significantly extend its operating life. Bellows are used on the ion implanters to achieve a travel stroke of several inches inside the vacuum chamber and still maintain vacuum integrity. Torsional effects, due to the absence of support, lead to frequent failures of conventional bellows. The modified bellows 1, shown in Figs. 1 and 2, include three guide rods 2 to be equally spaced around the inner diameter of the bellows and supported by bushings. A guide ring 3 is welded in the center of the bellows.