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Image Reversal of Positive Photoresist Without Additives

IP.com Disclosure Number: IPCOM000060086D
Original Publication Date: 1986-Feb-01
Included in the Prior Art Database: 2005-Mar-08

Publishing Venue

IBM

Related People

Authors:
Feinberg, GM MacIntyre, MW Motsiff, WT Tarasuk, M [+details]

Abstract

A unique set of processing conditions is used to obtain a negative resist image from a positive resist without the use of resist additives.