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Process for Etching Chromium

IP.com Disclosure Number: IPCOM000060122D
Original Publication Date: 1986-Feb-01
Included in the Prior Art Database: 2005-Mar-08

Publishing Venue

IBM

Related People

Authors:
Hinsberg, W Lee, JH Willson, G [+details]

Abstract

An etching process is described in which chromium is selectively etched by a solution containing Thiourea, sulfuric acid and water (TSW).