Cleaning the Reaction Tube Prior to Open Tube Diffusions
Original Publication Date: 1986-Mar-01
Included in the Prior Art Database: 2005-Mar-08
During the scavenging and heating-up cycle prior to open tube diffusion for doping semiconductor substrates, the conventionally used carrier gas is mixed with chlorine containing substances, such as HCl, Cl2, CCl4, CHCl3 or C2H3Cl3 . These substances form volatile compounds with dopant-containing residues precipitated during the preceding diffusion step on the wall of the reaction tube.