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High-Precision Laser Scanning Microscope

IP.com Disclosure Number: IPCOM000060153D
Original Publication Date: 1986-Mar-01
Included in the Prior Art Database: 2005-Mar-08

Publishing Venue

IBM

Related People

Authors:
Frosch, A Wagner, D [+details]

Abstract

A laser scanning microscope with submicron spatial resolution is obtained by arranging a glass scale in the intermediate image plane and focussing the scanning beam in that plane. The optical system is illustrated schematically in the cross- sectional views of Figs. 1A and 1B, the latter showing the system rotated by 90Πabout the optical axis. A collimated laser beam 3 exits from optical fiber 2 to be deflected by semitransparent mirror 4 onto scanning device 1, say, a resonant mirror (one-dimensional scanning being sufficient, as object 11 is moved in the other orthogonal direction). The deflected beam 7 (7a, 7b designating two extreme positions) then traverses an optical grating 6 to be split perpendicularly to the scanning direction into three beams 13a to 13c.